| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for forming a liquid repellent film having high density and high durability performance on a nozzle plate of a liquid ejection head. <P>SOLUTION: The method forms a metallic alkoxide molecular film 24 on a surface of the nozzle plate 18 using a vapor-phase film formation method. The method includes: a first film formation step of forming a film with a first liquid repellent agent 25 on the nozzle plate; and a second film formation step of forming a film with a second liquid repellent agent 26 on the nozzle plate 18. Here, the second film formation step is performed after the first film formation step. The second liquid repellent agent 26 is selected so that the second liquid repellent agent has a shorter molecular chain than that of the first liquid repellent agent 25. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
