发明名称 液体吐出装置、ナノインプリントシステム及び液体吐出方法
摘要 <p>According an aspect of the present invention, when causing the liquid ejection head to perform a feeding operation along a first direction, the substrate is retracted outside the projected feeding region of the liquid ejection head and the supporting member thereof prior to starting the feeding operation of the liquid ejection head, preventing dusts and other foreign matters, generated as a result of the feeding operation of the liquid ejection head and the supporting member, from being deposited on a surface of the substrate onto which the liquid is to be deposited.</p>
申请公布号 JP5748291(B2) 申请公布日期 2015.07.15
申请号 JP20120043570 申请日期 2012.02.29
申请人 发明人
分类号 H01L21/027;B05C5/00;B29C59/02;H01L21/68 主分类号 H01L21/027
代理机构 代理人
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