NICKEL PRECURSORS WITH AMINOTHIOLATE, PREPARATION METHOD THEREOF AND PROCESS FOR THE FORMATION OF THIN FILMS USING THE SAME

摘要

The present invention relates to a nickel precursor represented by a chemical formula 1. The nickel precursor is a precursor containing sulfur and has an advantage wherein separate sulfur need not to be added when manufacturing a thin film. Moreover, a nickel thin film containing high-quality sulfur can be formed as improving thermal stability. [Chemical Formula 1] In the above chemical formula, R1 and R2 are respectively and independently a linear type of C1-C10 or branching form alkyl group, R3 and R4 are respectively and independently a linear type of C1-C10 or alkyl and fluoroalkyl group of a branching form, and n is selected in a number from 1 to 3.