| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To measure a parameter value of the same value as another measuring apparatus when a parameter of an equivalent circuit is measured for the same sample. <P>SOLUTION: A processing section 6 executes frequency characteristic data acquisition processing, frequency characteristic data correction processing and parameter correction processing. In the frequency characteristic data acquisition processing, measurement frequency characteristic data D<SB POS="POST">Fb</SB>indicating impedance Z<SB POS="POST">b</SB>and a phaseθ<SB POS="POST">b</SB>in each frequency of a sample 8 are acquired. In the frequency characteristic data correction processing, the impedance Z<SB POS="POST">b</SB>indicated by the acquired measurement frequency characteristic data D<SB POS="POST">Fb</SB>is multiplied by an impedance correction coefficient (m) for correction into correction impedance Z<SB POS="POST">b1</SB>and a phase correction value (n) is added to the phaseθ<SB POS="POST">b</SB>indicated by the measurement frequency characteristic data D<SB POS="POST">Fb</SB>for correction into a correction phaseθ<SB POS="POST">b1</SB>, thereby calculating correction frequency characteristic data D<SB POS="POST">Fb1</SB>. In the parameter correction processing, parameter values D<SB POS="POST">Lb1</SB>, D<SB POS="POST">Cb1</SB>, D<SB POS="POST">Rb1</SB>of parameters of an equivalent circuit of the sample 8 are calculated on the basis of the correction frequency characteristic data D<SB POS="POST">Fb1</SB>and multiplied by parameter correction values k<SB POS="POST">L</SB>, k<SB POS="POST">C</SB>, k<SB POS="POST">R</SB>for correction. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
