| 摘要 |
There is provided a work apparatus that can detect feeding errors of a second robot provided at a position different from a position of a first robot in a Z direction. The work apparatus includes a first robot 20 that is provided so as to be movable in an X direction and a Y direction, a second robot 50 that is provided at a position different from a position of the first robot 20 in a Z direction so as to be movable in the X direction and the Y direction, an inspection mark 61 that is provided on a work device 60 mounted on the second robot 50, an imaging device 40 that is provided on the first robot 20, first robot-feeding error detecting means for detecting first robot-feeding errors on the basis of a reference mark 91 that is imaged by the imaging device 40, relative position detecting means for moving the first and second robots 20 and 50 to inspection positions and detecting relative position errors of the first and second robots 20 and 50 on the basis of the inspection mark 61 that is imaged at the inspection positions by the imaging device 40, and second robot-feeding error detecting means for detecting second robot-feeding errors on the basis of the first robot-feeding errors and the relative position errors. |
