| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter capable of suppressing a reduction in resolution with a simple structure, and further to provide an optical module and an electronic apparatus.SOLUTION: A wavelength variable interference filter 5 comprises: a fixed substrate 51 that has a flat fixed counter-surface 51A; a movable substrate 52 that has a flat movable counter-surface 52A opposite to the fixed counter-surface 51A; a fixed electrode 561 disposed on the fixed counter-surface 51A; a movable electrode 562 that is disposed on the movable counter-surface 52A and is opposite to the fixed electrode 561 through a gap G2 between the fixed electrode 561 and the movable electrode 562; an intermediate layer 57 that is disposed on the movable counter-surface 52A, is parallel to the fixed counter-surface 51A and the movable counter-surface 52A, has a flat reflecting film fixing surface 57A opposite to the fixed counter-surface 51A and has a thickness dimension greater than that of the fixed electrode 561; a movable reflecting film 55 disposed on the reflecting film fixing surface 57A; and a fixed reflecting film 54 that is disposed on the fixed counter-surface 51A and is opposite to the movable reflecting film 55 through a gap G1 between the fixed reflecting film 54 and the movable reflecting film 55. |
