| 摘要 |
<p>The invention provides a dust-proofing thin film assembly which can prevent a photomask from being damaged because a frame is not contacted with the photomask even though the dust-proofing thin film assembly is pressed on the photomask in strong force. The dust-proofing thin film assembly attaches a dust-proofing thin film on one end face of the frame, and an adhesive layer is arranged on the other end face of the frame. The dust-proofing thin film assembly is characterized in that the adhesive layer contains an adhesive and a particle space agent. The hardness of the space agent, measured by an A durometer, is lower than 80, so that the space agent is harder than the adhesive.</p> |
