| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for measuring a shape of a cylindrical surface that can measure the shape of a cylindrical surface easily and in a short time by using laser scanning interference and obtain a surface image of the cylindrical surface. <P>SOLUTION: Reflected lights from a reference plane 9a located close to a focal plane of a telecentric fθlens 8 and an observed cylindrical surface 10a is converted into a parallel luminous flux through the telecentric fθlens 8. The parallel luminous flux is condensed by an imaging lens 11 to be passed through a pinhole 12a disposed at the same position as the focal plane of the telecentric fθlens 8. A light receiving element 13 measures the light quantity of the reflected light passing through the pinhole 12a. While laser light from a laser light source 1 is continuously illuminated or pulse-illuminated, a measured object 10 having the observed cylindrical surface 10a is measured by scanning scanning light along a bus line of the observed cylindrical surface 10a and rotating the observed object 10 around a cylindrical shaft 10b thereof. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
