发明名称 MOUNTING PORT AND MOUNTING PORT OPENING/CLOSING METHOD
摘要 A mounting port that is provided includes a shutter that raises little dust and has a simple opening and closing mechanism. The mounting port allows an article to be relayed between a worker and a conveying apparatus or a processing device in a clean room. The mounting port includes an article mounting stand; an apparatus-side opening that allows a conveying apparatus or a processing device to pass an article to and from the mounting stand; a passageway-side opening that faces a worker passageway; shutters that are provided at positions for opening and closing the apparatus-side opening and comprise arc-shaped plates or plates bent like an arc; and a swing mechanism that swings the shutters about predetermined axes between a state in which the apparatus-side opening is opened and a state in which the apparatus-side opening is closed.
申请公布号 EP2894663(A1) 申请公布日期 2015.07.15
申请号 EP20130835360 申请日期 2013.07.23
申请人 MURATA MACHINERY, LTD. 发明人 OGO HARUKI;SHIMADA HIROYUKI
分类号 H01L21/677;H01L21/67 主分类号 H01L21/677
代理机构 代理人
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