发明名称 Logic circuit
摘要 An object is to apply a transistor using an oxide semiconductor to a logic circuit including an enhancement transistor. The logic circuit includes a depletion transistor 101 and an enhancement transistor 102. The transistors 101 and 102 each include a gate electrode, a gate insulating layer, a first oxide semiconductor layer, a second oxide semiconductor layer, a source electrode, and a drain electrode. The transistor 102 includes a reduction prevention layer provided over a region in the first oxide semiconductor layer between the source electrode and the drain electrode.
申请公布号 US9083334(B2) 申请公布日期 2015.07.14
申请号 US201313761302 申请日期 2013.02.07
申请人 Semiconductor Energy Laboratory Co., Ltd. 发明人 Koyama Jun;Akimoto Kengo;Tsubuku Masashi
分类号 H03K19/20;H03K19/094;H01L27/12;H03K19/096;H01L27/088 主分类号 H03K19/20
代理机构 Robinson Intellectual Property Law Office, P.C. 代理人 Robinson Eric J.;Robinson Intellectual Property Law Office, P.C.
主权项 1. A semiconductor device comprising: a logic circuit comprising: a first transistor comprising a first gate electrode, a first electrode, and a second electrode; a second transistor comprising a second gate electrode, the second electrode of the first transistor, and a third electrode; a first terminal electrically connected to the second gate electrode; and a second terminal electrically connected to a portion where the second transistor is connected to the first transistor, wherein a high power supply voltage terminal is electrically connected to the first electrode; wherein a low power supply voltage terminal is electrically connected to the third electrode, wherein the first transistor comprises: the first gate electrode;a gate insulating layer over the first gate electrode;a first oxide semiconductor layer over the gate insulating layer;the first electrode which is electrically connected to the first oxide semiconductor layer; andthe second electrode which is electrically connected to the first oxide semiconductor layer, wherein the second transistor comprises: the second gate electrode;the gate insulating layer over the second gate electrode;a second oxide semiconductor layer over the gate insulating layer;the second electrode which is electrically connected to the second oxide semiconductor layer; andthe third electrode which is electrically connected to the second oxide semiconductor layer, wherein a layer comprising oxygen and silicon is on the second oxide semiconductor layer, wherein a region of the second oxide semiconductor layer in contact with the layer has a smaller thickness than a region of the second oxide semiconductor layer in contact with the second electrode and a region of the second oxide semiconductor layer in contact with the third electrode, and wherein a resistance of the second oxide semiconductor layer is lower than a resistance of the first oxide semiconductor layer.
地址 Atsugi-shi, Kanagawa-ken JP