Insulating sheet having heterogeneous laminated structure, method of manufacturing the same, and transistor including the insulating sheet

摘要

An insulating sheet has a heterogeneous laminated structure, and includes a graphene sheet and a hexagonal boron nitride sheet on the graphene sheet, the hexagonal boron nitride sheet having a root mean square (RMS) surface roughness of about 0.5 nm or less in a region having an area of about 200 nm×200 nm or less, and one or more of longitudinal and transverse lengths of about 1 mm or more.

主权项

1. An insulating sheet having a heterogeneous laminated structure, the insulating sheet comprising:
a graphene sheet; and a hexagonal boron nitride sheet on the graphene sheet, the hexagonal boron nitride sheet having a root mean square (RMS) surface roughness of about 0.5 nm or less in a region having an area of aboiit 200 nm×200 nm or less, and one or more of longitudinal and transverse lengths of about 1 mm or more, wherein the graphene sheet includes at least one polycyclic aromatic sheet in which a plurality of carbon atoms are arranged on a single plane and connected by covalent bonds, and a thickness of the graphene sheet is about 30 nm or less.