Symmetrical inductively coupled plasma source with side RF feeds and RF distribution plates

摘要

A plasma reactor has an overhead multiple coil inductive plasma source with symmetric and radial RF feeds and cylindrical RF shielding around the symmetric and radial RF feeds. The radial RF feeds are symmetrically fed to the plasma source.

主权项

1. A plasma reactor comprising:
a window assembly; inner, middle and outer coil antennas adjacent said window assembly having a common axis; a current distribution ring adjacent and coupled to said middle coil antenna; a first conductive plate lying in a plane above said inner, middle and outer coil antennas, a first plurality of axial rods connected between a peripheral annular zone of said first conductive plate and said current distribution ring; a conductive ground plate in a plane between said first conductive plate and said current distribution ring; and a first radial conductive feed rod lying in a plane above said conductive ground plate and having an inner end coupled to a center of said first conductive plate and an outer end comprising a first RF feed terminal.