Tube target

摘要

The invention relates to a tube target (50) for sputtering, with a target (46) disposed on a cylindrical carrier tube. This target (46) is divided into several segments. The target (46) includes at least one groove (51-54) extending obliquely with respect to its rotational axis.

主权项

1. Tube target for sputtering with
1.1 a cylindrical carrier tube (23, 38), 1.2 a cylindrical sputtering target (22, 36, 46) divided into at least one curved segment (17-19, 43-45), which sputtering target is disposed on the carrier tube (23, 38), 1.3 a connecting layer (30, 37) provided between the target (22, 36, 46) and the carrier tube (23, 38), whereby said connecting layer (30, 37) extends substantially the entire length of the cylindrical sputtering target (22, 36, 46),characterized in that the target (22, 36) includes parallel and/or obliquely to its rotational axis (5, 27) at least one groove (4, 8, 10, 11, 13, 14, 15, 16, 21, 25, 26, 34, 40, 51-54), wherein said target is divided by said at least one groove (4, 8, 10, 11, 13, 14, 15, 16, 21, 25, 26, 34, 40, 51-54) into said at least one curved segment (17-19, 43-45).