Observation system and observation method

摘要

An observation system 100 for observing a to-be-observed specimen 1 on the basis of coming light 2 coming from the to-be-observed specimen 1 includes a conversion unit 104 configured to convert the coming light 2 to a first converted light ray with a first pupil function and to convert the coming light 2 to a second converted light ray with a second pupil function and an image information generation unit 106 configured to generate image information on the to-be-observed specimen 1 on the basis of the first converted light ray obtained by converting the coming light 2 with the first pupil function and the second converted light ray obtained by converting the coming light with the second pupil function. The second pupil function is preferably different from the first pupil function.

主权项

1. An observation system for observing a to-be-observed specimen on the basis of coming light coming from the to-be-observed specimen, comprising:
a first conversion unit configured to convert the coming light to a first converted light ray with a first pupil function; a second conversion unit configured to convert the coming light to a second converted light ray with a second pupil function different from the first pupil function; andan image information generation unit configured to generate image information on the to-be-observed specimen on the basis of the first converted light ray and the second converted light ray,
wherein each of the first pupil function and the second pupil function is a function in two-dimensional donut shape with an inner ring and an outer ring, the first conversion section and the second conversion section allow regions inside the respective inner rings to function as shielded regions and allow regions surrounded by the respective inner rings and the respective outer rings to function as non-shielded regions of the first pupil function and the second pupil function, respectively, and the first pupil function and second pupil function change at least one of a phase, a transmittance, and a reflectivity of the respective regions surrounded by the respective inner rings and the respective outer rings.