Zone compensated multilayer laue lens and apparatus and method of fabricating the same

摘要

A multilayer Laue Lens includes a compensation layer formed in between a first multilayer section and a second multilayer section. Each of the first and second multilayer sections includes a plurality of alternating layers made of a pair of different materials. Also, the thickness of layers of the first multilayer section is monotonically increased so that a layer adjacent the substrate has a minimum thickness, and the thickness of layers of the second multilayer section is monotonically decreased so that a layer adjacent the compensation layer has a maximum thickness. In particular, the compensation layer of the multilayer Laue lens has an in-plane thickness gradient laterally offset by 90° as compared to other layers in the first and second multilayer sections, thereby eliminating the strict requirement of the placement error.

主权项

1. A multilayer Laue lens comprising:
a first multilayer section formed on a substrate including a plurality of alternating layers made of a pair of two different materials; a compensation layer formed on the first multilayer section; a second multilayer section formed on the compensation layer including a plurality of alternating layers made of a pair of two different materials, wherein an in-plane thickness gradient of the compensation layer is laterally offset by 90° as compared to other layers in the first and second multilayer sections.