Ozone generating apparatus

摘要

There is provided an ozone generating apparatus that requires no use of cooling water, is small in size and easy in maintenance. The ozone generating apparatus includes a ground electrode 1 formed of a substantially cylindrical metal tube, and a high voltage electrode 5 having a substantially cylindrical dielectric body substantially concentrically arranged inside the ground electrode, and having a high voltage applied to an electrically conductive layer 6 formed on an inner peripheral surface thereof, in which an oxygen-containing gas is supplied into an electric discharge gap formed between the ground electrode and the high voltage electrode to generate ozone, wherein the ground electrode is formed integrally with plural air cooling fins 2 extending in a longitudinal direction at an outer peripheral side thereof.

主权项

1. An ozone generating apparatus, the apparatus comprising:
a ground electrode formed of a substantially cylindrical metal tube, and a high voltage electrode having a substantially cylindrical dielectric body substantially concentrically arranged inside the ground electrode, and configured to have a high voltage applied to an electrically conductive layer formed on an inner peripheral surface thereof, in which an oxygen-containing gas is supplied from a raw gas inlet into an electric discharge gap formed between the ground electrode and the high voltage electrode to generate ozone, wherein the ground electrode is formed integrally with plural air cooling fins extending in a longitudinal direction at an outer peripheral side thereof, the high voltage electrode integrates the dielectric body with a high voltage electrode member connected to the electrically conductive layer and applying the high voltage, and is held into the ground electrode to configure a discharge tube unit together with the ground electrode, a plurality of the discharge tube units are provided, the plurality of discharge tube units are separately housed and fixed in respective housings forming ventilating paths connected to an inlet for providing cooling air to the plural air cooling fins, the cross sections of the housings being a rectangular shape, the ventilating paths for the plurality of discharge tube units are independent of each other, and the cooling air flows therethrough separately to the respective discharge tube units, and the cooling air is provided from a source different from the oxygen-containing gas.