Self-aligning pick-up head and method for manufacturing a device with the self-aligning pick-up head

摘要

A self-aligning pick-up head, a method to manufacture a pick-up head and a method of manufacturing a device are disclosed. In one embodiment a pick-up head includes a nozzle having a first end portion and a second end portion and a base tool comprising a collet head, wherein the first end portion of the nozzle is gimbaled to the base tool.

主权项

1. A pick-up head comprising:
a base tool comprising:
a first main surface;a second main surface; anda recess located between the first main surface and the second main surface,wherein the recess comprises at least a portion of a spherical surface;
a nozzle comprising a first end portion having at least a portion of a spherical surface and a second end portion; a cover mounted on the first main surface of the base tool, wherein the cover retains the nozzle against the base tool; and a collet head mounted on the second main surface of the base tool, wherein the portion of the spherical surface of the nozzle is placed on the portion of the spherical surface of the recess, and wherein the base tool is movable relative to the second end portion of the nozzle.