Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

摘要

A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.

主权项

1. An exposure method of exposing an object with an energy beam, the method comprising:
mounting the object on a movable body that can move at least in a first direction and a second direction orthogonal in a predetermined plane; measuring positional information of the movable body using an encoder system, which has one of a grating section and a head unit arranged at the movable body where the object is held and the other arranged external to the movable body and measures positional information of the movable body in the predetermined plane with a head that faces the grating section among a plurality of heads of the head unit; and controlling a position of the movable body in the predetermined plane, based on correction information to compensate for at least a measurement error of the encoder system that occurs due to a position or displacement, in a direction orthogonal to a measurement direction in the predetermined plane, of a detection point of the head used for the measurement and measurement information of the encoder system.