Microelectronic device and electronic apparatus

摘要

A movable section located in a hollow portion covered with a wall and a first sealing layer which are on a substrate and the first sealing layer located in an area facing the movable section are provided, the movable section is located between the substrate and the first sealing layer, and at least part of the movable section and the first sealing layer is an electric conductor.

主权项

1. A microelectronic device comprising:
a movable section located in a hollow portion covered with a covering section comprising a lid section and a sidewall section on a substrate; a fixing section that is provided on the substrate, the fixing section facing the movable section; the lid section located in the covering section in an area facing the movable section; a side wall insulating film that is located in the covering section between the substrate and the lid section and provides isolation between the substrate and the lid section; a switch circuit that is configured by a three-terminal switch selectively connecting among the movable section, the lid section and the sidewall section so as to switch between a first state and a second state; and a voltage circuit that supplies a voltage, wherein the side wall insulating film is located between the lid section and the sidewall section so as to electrically separate the lid section from the sidewall section, the movable section is located between the substrate and the lid section, the movable section, the sidewall section and the lid section are electric conductors, when the first state is selected by the switch circuit, the sidewall section and the lid section are connected to a ground potential at the same time, and when the second state is selected by the switch circuit, the voltage circuit supplies the voltage between the lid section and the movable section at the same time and the sidewall section is connected to the ground potential.