Manufacturing method of metal wire and thin transistor array panel, and organic light emitting diode display

摘要

A manufacturing method of a wire including: forming a lower layer on a substrate; forming a middle layer on the lower layer; forming an upper layer on the middle layer; forming, exposing, and developing a photoresist layer on the upper layer to form a photoresist pattern; and etching the upper layer, the middle layer, and the lower layer by using the photoresist pattern as a mask to form a wire such that the upper layer covers an end of the middle layer.

主权项

1. An organic light emitting display, comprising:
a substrate; a gate line disposed on the substrate; a data line and a driving voltage line disposed on the substrate and intersecting the gate line; a first thin film transistor comprising a first gate electrode connected to the gate line and a first source electrode connected to the data line; a second thin film transistor comprising a second gate electrode connected to a first drain electrode of the first thin film transistor and a second source electrode connected to the driving voltage line; a first electrode connected to the second drain electrode of the second thin film transistor; an organic emission layer disposed on the first electrode; and a second electrode disposed on the organic emission layer, wherein: at least one of the gate line and the driving voltage line comprises a lower layer, a middle layer, and an upper layer; and the middle layer comprises aluminum (Al), nickel (Ni), and lanthanum (La).