Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium

摘要

A substrate treatment system comprise a treatment station having a plurality of treatment units provided at multiple tiers in an up-down direction, a cassette mounting table on which a cassette housing a plurality of wafers W is mounted, and a wafer transfer mechanism arranged between the treatment station and the cassette mounting table, wherein a delivery block in which a plurality of delivery units are provided at multiple tiers is provided between the treatment station and the wafer transfer mechanism, the delivery units temporarily housing a wafer to be transferred between the cassette mounting table and the treatment station and a wafer to be transferred between the tiers of the treatment units. The wafer transfer mechanism includes a first transfer arm that transfers a wafer between the cassette mounting table and the delivery block, and a second transfer arm that transfers a wafer between the tiers of the delivery units.

主权项

1. A substrate treatment system comprising a treatment station having a plurality of treatment units which treat a substrate provided at multiple tiers in an up-down direction, a cassette mounting part on which a cassette housing a plurality of substrates is mounted, and a plurality of substrate transfer mechanisms arranged between the treatment station and the cassette mounting part,
wherein a plurality of delivery units are provided at multiple tiers between said treatment station and said substrate transfer mechanisms, said delivery units temporarily housing a substrate to be transferred between said cassette mounting part and said treatment station and a substrate to be transferred between the tiers of said treatment units, wherein each of said substrate transfer mechanisms comprises a first transfer arm that transfers a substrate between said cassette mounting part and each of said delivery units, and a second transfer arm that transfers a substrate between the tiers of said delivery units, wherein said plurality of said substrate transfer mechanisms are provided side by side in a horizontal direction in a plan view, and wherein each of said substrate transfer mechanisms has a moving route along which the substrate transfer mechanism moves, and said plurality of said substrate transfer mechanisms are arranged such that the moving routes in the horizontal direction in the plan view overlap with each other.