Device wafer processing method

摘要

A device wafer has a plurality of devices individually formed in a plurality of separate regions on the front side of the wafer, the separate regions being defined by a plurality of crossing division lines. The wafer is processed by imaging the front side of the wafer to detect and store a target pattern, holding the front side of the wafer and grinding the back side of the wafer to thereby reduce the thickness to a predetermined thickness, imaging the front side of the wafer and next positioning the wafer with respect to a ring frame according to the target pattern stored so that the wafer is oriented to a predetermined direction, and attaching an adhesive tape to the back side of the wafer to thereby mount the wafer through the adhesive tape to the ring frame.

主权项

1. A device wafer processing method of processing a device wafer having a plurality of devices individually formed in a plurality of separate regions on a front side of said device wafer, said separate regions being defined by a plurality of crossing division lines, said device wafer processing method comprising:
a target pattern storing step of imaging the front side of said device wafer to detect and store a target pattern; a protective tape attaching step of attaching a protective tape to the front side of said device wafer after performing said target pattern storing step; a grinding step of holding the front side of said device wafer through said protective tape after performing said protective tape attaching step and next grinding a back side of said device wafer to thereby reduce the thickness of said device wafer to a predetermined thickness; a positioning step of imaging the front side of said device wafer after performing said grinding step and next positioning said device wafer with respect to a ring frame according to said target pattern stored by performing said target pattern storing step so that said device wafer is oriented to a predetermined direction; and a transfer step of attaching an adhesive tape to the back side of said device wafer after performing said positioning step to thereby mount said device wafer through said adhesive tape to said ring frame and next removing said protective tape from the front side of said device wafer.