System for transfer of nanomembrane elements with improved preservation of spatial integrity

摘要

Transfer of nanoscale elements from a substrate on which they were manufactured or transferred to a flexible sheet may be performed by local and progressive deformation of the flexible sheet over the surface of the substrate to attach and lift the nanoscale elements from the substrate with controlled inter-element registration.

主权项

1. A method of generating large-scale arrays of nano-patterned elements comprising the steps of:
(a) receiving a substrate with the nano-patterned elements on a surface of the substrate; (b) overlaying the substrate and the nano-patterned elements with a flexible sheet; (c) locally deforming the flexible sheet into intimate contact with a first subset of the nano-patterned elements to cause preferential adhesion thereto in an area of the contact; (d) changing a location of the deformation of the flexible sheet with respect to the substrate to lift the first subset of nano-patterned elements from the substrate and to deform the flexible sheet into close contact with a different second subset of nano-patterned elements to cause preferential adhesion thereto in the area of contact; and (e) repeating steps (c) and (d) with different subsets of the nano-patterned elements.