Scanning probe microscope with improved feature location capabilities

摘要

An SPM assembly includes an SPM and a wide field image acquisition device that can be used to rapidly locate a region of interest and position that region within a SPM scan range of 100 microns or less. The wide field image acquisition device may include a low resolution camera having wide field of view in excess of 12 mm, and a high magnification camera having a field of view in the single mm range. Alternatively, a single camera could be used if it has sufficient zoom capability to have functionalities commensurate with both cameras. Collocation preferably is employed to coordinate translation between the low magnification and high magnification cameras (if separate cameras are used) and between the high magnification camera and the SPM.

主权项

1. A method of operating a scanning probe microscope (SPM) assembly having a wide field image acquisition device and an SPM, the wide field image acquisition device having a field of view having a maximum dimension of at least 12 mm, and the SPM having a scan range having a maximum dimension of no more than 200 microns:
calibrating the wide field image acquisition device and the SPM so that the field of view of the wide field image acquisition device and the scan range of the SPM are collocated; placing a sample within the field of view of the wide field image acquisition device; using the wide field image acquisition device, locating a region of interest on the sample surface having a maximum dimension of less than 200 microns; effecting relative sample/SPM assembly movement to position the region of interest within the scan range of the SPM; and scanning the region of interest with a probe of the SPM and acquiring data while monitoring interaction between the probe and the sample.