Pneumatic clamping mechanism for cells with adjustable height

摘要

In some embodiments of the present disclosure, an apparatus for combinatorial wet processing includes: a chuck, a substrate located on the chuck, a cell located over the substrate; and a height adjustment mechanism for the cell above the substrate wherein applying compressed air on an O-ring in a gland prevents vertical movement of the cell relative to the position of the substrate.

主权项

1. An apparatus for combinatorial wet processing, comprising:
a chuck operable to hold a substrate thereon; a plurality of cells disposed over the chuck; and a support plate comprising a plurality of annular glands, a plurality of transverse channels, and a plurality of O-rings,
wherein the support plate is disposed around each of the plurality of cells for pneumatically clamping each of the plurality of cells and maintaining a vertical position of each of the plurality of cells relative to the chuck,wherein each of the plurality of annular glands is arranged in registration with a respective one of the plurality of cells,wherein each of the plurality of O-ring is disposed within a respective one of the plurality of annular glands and surrounds a corresponding one of the plurality of cells;wherein each of the plurality of transverse channels connects a respective one of the plurality of annular glands to a pressure source for supplying one of a pressurized gas and a hydraulic fluid into the respective one of the plurality of annular glands and changing a pressure differential across a respective one of the plurality of O-rings within the respective one of the plurality of annular glands;wherein each of the plurality of O-rings seals a respective one of the plurality of annular glands such that the one of the pressurized gas and the hydraulic fluid cannot flow within the respective one of the plurality of annular glands past the each of the plurality of O-rings;wherein each of the plurality of O-rings is deformable and movable between a first position and a second position within a respective one of the plurality of annular glands in response to changing the pressure differential across the each of the plurality of O-rings within the respective one of the plurality of annular gland while sealing the respective one of the plurality of annular gland;wherein, in the first position, each of the plurality of O-rings is pressed against a respective one of the plurality of cells causing a static friction at an interface between the each of the plurality of O-rings and the respective one of the plurality of cells and maintains the vertical orientation of the respective one of the plurality of cells relative to the support plate; andwherein, in the second position, the each of the plurality of O-rings is spaced apart from a respective one of the plurality of cells and allows the respective one of the plurality of cells to move vertically relative to the support plate.