| 摘要 |
FIELD: measurement equipment.SUBSTANCE: invention relates to vacuum measurement and to measurement devices of partial gas pressures and is designed for control of total pressure, density and chemical composition of gas in a test volume. An analyser of total pressure, density and partial pressure of water vapours in low vacuum includes a piezoelectric resonance-type sensor of gas density, and an electronic measurement and indication unit. Additionally, the analyser includes a piezoelectric resonance-type sensor of total gas pressure, which is located inside a sealed deformable bellow, a sorption-capacitive water vapour sensor, two temperature sensors, one of which is located inside the bellow, which are located in a common housing. Besides, the analyser includes an electronic unit providing an algorithm of differential conversion of sensor signals considering variation of total gas pressure and temperature.EFFECT: wider range of measured parameters, improvement of accuracy and informativity of measurement.2 dwg |
