发明名称 APPARATUS FOR TRANSFERRING SUBSTRATE
摘要 The present invention relates to a substrate transfer apparatus comprising: a transfer arm supporting a substrate; a lifting unit lifting the transfer arm; a first rotary unit supporting the lifting unit and enabling the lifting unit to be rotated in a horizontal direction to enable the transfer arm to be rotated in the horizontal direction; a driving unit supporting the first rotary unit and transferring the substrate; a second rotary unit enabling the lifting unit to be rotated in parallel to an upper surface of the first rotary unit. According to the present invention, easiness of storage and transport in a narrow space is improved without cutting the lifting unit.
申请公布号 KR20150080729(A) 申请公布日期 2015.07.10
申请号 KR20140000163 申请日期 2014.01.02
申请人 HYUNDAI HEAVY INDUSTRIES CO., LTD. 发明人 KIM, JONG WOOK;KIM, SANG HYUN;KIM, TAE HYUN
分类号 H01L21/677;B25J9/04 主分类号 H01L21/677
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