| 摘要 |
FIELD: process engineering.SUBSTANCE: invention relates to computer-aided feed-through device for plasma processing of upper blanks. This device comprises loading and unloading chambers linearly integrated with vacuum chamber and connected therewith and with ambient medium by the system of gates, two electrodes, HF generator, plasma-forming gas fed system, vacuum evacuation station, system of gates, compressor and three servicing robots. System of gates allows sealing of chambers with the help of air backings arranged in perimeter of chambers openings that can be filled with air and release it. Chambers are equipped with lengthwise supports provided with channels at their bottom to allow installation, displacement and removal of grippers with blanks.EFFECT: eliminated manual labour, higher efficiency and safety.3 cl, 4 dwg |
