| 摘要 |
FIELD: instrumentation.SUBSTANCE: sensitive element of a microsystem gyroscope comprises a case silicon plate, external and internal movable frames symmetrically located inside each other and separated with even gaps, at the same time the external frame is connected to the base silicon plate and to the internal frame by means of elastic torsions, longitudinal axes of each pair of torsions are mutually perpendicular, between the case silicon plate and the movable frames there is a gap formed by means of through anisotropic etching, to one side the case silicon plate an insulating liner is rigidly attached with applied fixed conducting electrodes of the electrostatic power converter setting forced oscillations of the internal frame, at the same time at both sides of the case silicon plate there are insulation liners attached, onto which electrodes of the electrostatic power converter are applied, which set forced oscillations of the internal frame, electrodes of the capacitance converter of movements and electrodes of the power electrostatic converter of feedback, the external movable frame is a movable conducting electrode of the electrostatic power converter of feedback, compensating the torque from action of Coriolis force, and the movable conducting electrode of the capacitance converter of movements.EFFECT: increased accuracy of measurements.2 dwg |
