| 摘要 |
PROBLEM TO BE SOLVED: To enable improvement in throughput.SOLUTION: A substrate processing apparatus according to an embodiment comprises a plurality of processing units and a plurality of substrate transfer devices. The plurality of processing units are arranged side by side in a vertical direction, for processing a substrate. The substrate transfer devices are movable in the vertical direction and carries in/out the substrate to/from the processing units. In addition, the substrate transfer devices are arranged side by side in a vertical direction and a movable range in a vertical direction overlaps each other and includes a first transfer arm and a second transfer arm, which independently move to a vertical direction. |
