| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a vibrator capable of efficiently and accurately performing a frequency adjustment.SOLUTION: A manufacturing method of a vibrator includes: a mounting step of mounting a vibration element 2 having a weight portion 5 on a base 91; a lid bonding step of bonding a lid 92 to the base 91 and forming an accommodation space S for accommodating the vibration element 2 by the base 91 and the lid 92; and an adjustment step of irradiating a laser beam LL to the weight portion 5 via the lid 92 and sucking a weight material B removed while adjusting a resonant frequency of the vibration element 2 by removing at least a part of the weight portion 5.</p> |
