发明名称 SHIELDING STRUCTURES BETWEEN OPTICAL WAVEGUIDES
摘要 Methods and structures for shielding optical waveguides are provided. A method includes forming a first optical waveguide core and forming a second optical waveguide core adjacent to the first optical waveguide core. The method also includes forming an insulator layer over the first optical waveguide core and the second optical waveguide core. The method further includes forming a shielding structure in the insulator layer between the first optical waveguide core and the second optical waveguide core.
申请公布号 US2015192735(A1) 申请公布日期 2015.07.09
申请号 US201414151138 申请日期 2014.01.09
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ELLIS-MONAGHAN John J.;GAMBINO Jeffrey P.;JAFFE Mark D.;PETERSON Kirk D.;RANKIN Jed H.
分类号 G02B6/122;G02B6/132;G02B6/136;G02B1/04 主分类号 G02B6/122
代理机构 代理人
主权项 1. A method of manufacturing an optical waveguide device, comprising: forming a first optical waveguide core; forming a second optical waveguide core adjacent to the first optical waveguide core; forming an insulator layer over the first optical waveguide core and the second optical waveguide core; and forming a shielding structure in the insulator layer between the first optical waveguide core and the second optical waveguide core.
地址 Armonk NY US