HIGH-K/METAL GATE CMOS TRANSISTORS WITH TIN GATES

摘要

In described examples, an integrated circuit is formed with a thick TiN metal gate (146) with a work function greater than 4.85 eV and with a thin TiN metal gate (156) with a work function less than 4.25 eV. An integrated circuit is formed with a replacement gate PMOS TiN metal gate transistor (170) with a workfunction greater than 4.85 eV and with a replacement gate NMOS TiN metal gate transistor (172) with a workfunction less than 4.25 eV. An integrated circuit is formed with a gate first PMOS TiN metal gate transistor with a workfunction greater than 4.85 eV and with a gate first NMOS TiN metal gate transistor with a workfunction less than 4.25 eV.