PIEZOELECTRIC FILM, FERROELECTRIC CERAMICS, AND INSPECTION METHOD OF PIEZOELECTRIC FILM

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric film having excellent piezoelectric characteristics.SOLUTION: The ferroelectric ceramics forms a piezoelectric film 15 such as a PZT oriented to a c axis direction on a Pt film 13, SrTiO3 film 14. In the piezoelectric film 15 having a crystal 15a oriented to the c axis direction 16a and a crystal 15b oriented to an a axis direction 16b, when an amount of a component (004) of the crystal oriented to the c axis direction is denoted as C and an amount of a component (400) of the crystal oriented to the a axis direction is denoted as A, the piezoelectric film 15 satisfies Formula 1. C/(A+C)≥0.1 ... Formula 1.