| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an inspection apparatus and an inspection method, capable of performing inspection with higher accuracy.SOLUTION: The inspection apparatus comprises: a light source 10; a detector 11; and a processing unit that, when a test object item includes dimensions of a sample 20 in a surface shape or a height direction, performs inspection on the basis of correlation between a value of the test object item and a luminance value of a sample image obtained by the detector. As performing inspection on two or more test object items, the processing unit acquires the sample image under two or more imaging conditions, calculates the value of each test object item on the basis of two or more luminance values of the sample image, acquires a rate of change of the luminance value to a change of height of a base by simulation, and calculates the value of the test object item using the rate of change. A height of the base of a pattern 24 is included in the test object items.</p> |
