Method For Producing A Lithium-Based Electrolyte For A Solid Microbattery

摘要

A method for producing a solid lithium-based electrolyte for a solid microbattery implements the cathode sputtering of a lithium-based target material on an object supported by a substrate holder. A grid made of lithium-free electrically conductive material is interposed between the object and the lithium-based target material, the grid being electrically connected to the substrate holder.

主权项

1. A method of forming a solid lithium-based electrolyte for a solid microbattery, by cathode sputtering of a target lithium-based material in a cathode sputtering device comprising a cathode supporting the lithium-based target material and an object supported by a substrate holder, wherein;
the target lithium-based material is sputtered; a solid lithium-based electrolute is formed on the object; and wherein prior to the sputtering of the target lithium-based material, a grid made of lithium-free electrically-conductive material, is interposed between the object and the lithium-based target material, and the grid and the substrate holder are electrically connected.