发明名称 MANUFACTURING METHOD FOR DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a display device that prevents permanent bonding of a carrier substrate and a mother substrate.SOLUTION: A method includes: performing a surface treatment on at least one of two opposing surfaces of a carrier substrate and a mother substrate; bonding the carrier substrate and the mother substrate; performing a thin film formation process on the mother substrate; and separating the carrier substrate and the mother substrate. The thin film formation process includes a heat treatment, the surface treatment includes a treatment with an inorganic or organic acid, and the treatment with the inorganic or organic acid includes controlling the content of -OH, -OH, and -Ogroups of the at least one of two opposing surfaces of the carrier substrate and the mother substrate.
申请公布号 JP2015128140(A) 申请公布日期 2015.07.09
申请号 JP20140191494 申请日期 2014.09.19
申请人 SAMSUNG DISPLAY CO LTD 发明人 KHACHATRYAN HAYK
分类号 H01L21/02;B08B3/08;G02F1/13;G02F1/1333;G09F9/00;H01L21/304 主分类号 H01L21/02
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