SOLID STATE ELECTROLYTE AND BARRIER ON LITHIUM METAL AND ITS METHODS

摘要

A method of fabricating an electrochemical device comprising a lithium metal electrode, may comprise: providing a substrate with a lithium metal electrode on the surface thereof; depositing a first layer of dielectric material on the lithium metal electrode, the depositing the first layer being sputtering L13PO4 in an argon ambient; after the depositing the first layer, inducing and maintaining a nitrogen plasma over the first layer of dielectric material to provide ion bombardment of the first layer for incorporation of nitrogen therein; and after the depositing, the inducing and the maintaining, depositing a second layer of dielectric material on the ion bombarded first layer of dielectric material, the depositing the second layer being sputtering L13PO4 in a nitrogen-containing ambient. Electrochemical devices may comprise a barrier layer between the lithium metal electrode and the LiPON electrolyte. Tools configured for fabricating the electrochemical devices comprising lithium metal electrodes are also described.