| 摘要 |
<p>For achieving the purpose, the present invention, an apparatus for cleaning a substrate includes a lower housing which includes a holding part which has the concave center part of an upper side to arrange a substrate, at least one cleaning water inlet which is formed in a step part which is concave on one side of the holding part, and at least one cleaning water outlet on the other side of the holding part; and an upper housing which closes the upper side of the lower hosing.</p> |
