发明名称 APPARATUS FOR WET ETCHING
摘要 <p>Disclosed is a wet etching device enabling high quality etching while occupying a small space with a simple configuration. According to an embodiment of the present invention, the device includes a chamber in which etching is performed and an inner space to store an etching solution is placed; a spray part placed in an upper part of the chamber to spray the etching solution to a product; a product fixing part placed in the chamber to fix the product; a rotating unit rotating the product fixing part; a support part supporting the chamber in an upper part of the chamber; an etching solution circulating part circulating the etching solution to spray the etching solution stored in the chamber through a spray nozzle; an elevating part elevating the product fixing part; and an angle control part controlling a spray angle of the spray nozzle.</p>
申请公布号 KR20150080136(A) 申请公布日期 2015.07.09
申请号 KR20130167401 申请日期 2013.12.30
申请人 EXTOL CO., LTD. 发明人 CHOI, HEON YOUNG;HUR, WOOK HWAN;JUNG, WOO CHUL;JO, SEUL GI
分类号 C23F1/00;C23F1/46 主分类号 C23F1/00
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