发明名称 |
APPARATUS FOR WET ETCHING |
摘要 |
<p>Disclosed is a wet etching device enabling high quality etching while occupying a small space with a simple configuration. According to an embodiment of the present invention, the device includes a chamber in which etching is performed and an inner space to store an etching solution is placed; a spray part placed in an upper part of the chamber to spray the etching solution to a product; a product fixing part placed in the chamber to fix the product; a rotating unit rotating the product fixing part; a support part supporting the chamber in an upper part of the chamber; an etching solution circulating part circulating the etching solution to spray the etching solution stored in the chamber through a spray nozzle; an elevating part elevating the product fixing part; and an angle control part controlling a spray angle of the spray nozzle.</p> |
申请公布号 |
KR20150080136(A) |
申请公布日期 |
2015.07.09 |
申请号 |
KR20130167401 |
申请日期 |
2013.12.30 |
申请人 |
EXTOL CO., LTD. |
发明人 |
CHOI, HEON YOUNG;HUR, WOOK HWAN;JUNG, WOO CHUL;JO, SEUL GI |
分类号 |
C23F1/00;C23F1/46 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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