发明名称 VIBRATION PIECE, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, SENSOR AND MOVABLE BODY
摘要 PROBLEM TO BE SOLVED: To provide a vibration piece capable of highly accurately performing a fine adjustment of a resonant frequency of each vibration arm, and further to provide a vibrator provided with the vibration piece, an oscillator, an electronic apparatus, a sensor and a movable body.SOLUTION: A vibration piece 2 comprises: a vibration arm 5 including a base portion, an arm portion 50 extending from the base portion and a wide portion 59 being connected to a leading end portion of the arm portion 50 and having a width greater than that of the arm portion 50; a first driving electrode 84 provided on the vibration arm 5; and a weight layer 57 being provided on the wide portion 59 and having a thickness greater than that of the first driving electrode 84. The weight layer 57 includes: a first weight portion 571; and a second weight portion 572 being disposed closer to a base portion side than the first weight portion 571 and having a portion having a constant width less than a width of the first weight portion 571.
申请公布号 JP2015128267(A) 申请公布日期 2015.07.09
申请号 JP20130273625 申请日期 2013.12.27
申请人 SEIKO EPSON CORP 发明人 YAMADA AKINORI;YAMAZAKI TAKASHI;YOSHIDA SHUHEI;JOKURA TOSHINARI
分类号 H03H9/19;H03B5/32;H03H9/215 主分类号 H03H9/19
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