发明名称 |
VIBRATION PIECE, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, SENSOR AND MOVABLE BODY |
摘要 |
PROBLEM TO BE SOLVED: To provide a vibration piece capable of highly accurately performing a fine adjustment of a resonant frequency of each vibration arm, and further to provide a vibrator provided with the vibration piece, an oscillator, an electronic apparatus, a sensor and a movable body.SOLUTION: A vibration piece 2 comprises: a vibration arm 5 including a base portion, an arm portion 50 extending from the base portion and a wide portion 59 being connected to a leading end portion of the arm portion 50 and having a width greater than that of the arm portion 50; a first driving electrode 84 provided on the vibration arm 5; and a weight layer 57 being provided on the wide portion 59 and having a thickness greater than that of the first driving electrode 84. The weight layer 57 includes: a first weight portion 571; and a second weight portion 572 being disposed closer to a base portion side than the first weight portion 571 and having a portion having a constant width less than a width of the first weight portion 571. |
申请公布号 |
JP2015128267(A) |
申请公布日期 |
2015.07.09 |
申请号 |
JP20130273625 |
申请日期 |
2013.12.27 |
申请人 |
SEIKO EPSON CORP |
发明人 |
YAMADA AKINORI;YAMAZAKI TAKASHI;YOSHIDA SHUHEI;JOKURA TOSHINARI |
分类号 |
H03H9/19;H03B5/32;H03H9/215 |
主分类号 |
H03H9/19 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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