METHOD OF CHARGING A TEST CARRIER AND A TEST CARRIER

摘要

A method of charging a substrate with a plurality of through-going bores and a charged substrate, where the substrate is charged with a liquid comprising particles in a concentration resulting in a high percentage of bores charged with liquid with only a single particle therein.

主权项

1. A method of charging a test carrier with a liquid comprising particles, wherein the carrier comprises a slab having a number of through-going bores extending from a first side of the slab to a second, opposite side of the slab, the bores having a radius of R and a depth L, the test carrier comprising:
a first flow channel comprising a first end having a first opening, a third end having a third opening, and a first surface, positioned between the first and third ends and being at least partly defined by the first side of the slab, and a second flow channel comprising a second end having a second opening, a fourth end having a fourth opening, and a second surface, positioned between the second and fourth ends and being at least partly defined by the second side of the slab,the method comprising:
adding, via the first flow channel and to the bores of the carrier, a liquid comprising a carrier liquid with a liquid/air contact angle of γ and a concentration C of particles, where the concentration C of particles and the radius R fulfill the equation of:
P1=πCR2Lexp(−πCR2L) where L≧R cos(γ) and P1 exceeds 0.1 flowing a first fluid through the first flow channel and flowing a second fluid through the second channel.