发明名称 Probe Card
摘要 An apparatus and a method are disclosed herein. The apparatus is disclosed that includes a probe head and a circuit board. The probe head includes a metal housing and pins. The pins penetrate through the metal housing. The circuit board is configured to test a semiconductor device and includes a ground pad. The ground pad is electrically coupled between the metal housing and the circuit board.
申请公布号 US2015192608(A1) 申请公布日期 2015.07.09
申请号 US201414151052 申请日期 2014.01.09
申请人 Taiwan Semiconductor Manufacturing CO., LTD. 发明人 Hsu Ming-Cheng
分类号 G01R1/04;G01R1/073;G01R1/067 主分类号 G01R1/04
代理机构 代理人
主权项 1. An apparatus, comprising: a probe head, comprising: a metal housing; anda plurality of pins penetrating through the metal housing; and a circuit board configured to test a semiconductor device, wherein the pins are configured to electrically connect the semiconductor device to the circuit board, the circuit board comprising: a ground pad electrically coupled between the metal housing and the circuit board.
地址 Hsinchu TW