发明名称 |
Probe Card |
摘要 |
An apparatus and a method are disclosed herein. The apparatus is disclosed that includes a probe head and a circuit board. The probe head includes a metal housing and pins. The pins penetrate through the metal housing. The circuit board is configured to test a semiconductor device and includes a ground pad. The ground pad is electrically coupled between the metal housing and the circuit board. |
申请公布号 |
US2015192608(A1) |
申请公布日期 |
2015.07.09 |
申请号 |
US201414151052 |
申请日期 |
2014.01.09 |
申请人 |
Taiwan Semiconductor Manufacturing CO., LTD. |
发明人 |
Hsu Ming-Cheng |
分类号 |
G01R1/04;G01R1/073;G01R1/067 |
主分类号 |
G01R1/04 |
代理机构 |
|
代理人 |
|
主权项 |
1. An apparatus, comprising:
a probe head, comprising:
a metal housing; anda plurality of pins penetrating through the metal housing; and a circuit board configured to test a semiconductor device, wherein the pins are configured to electrically connect the semiconductor device to the circuit board, the circuit board comprising:
a ground pad electrically coupled between the metal housing and the circuit board. |
地址 |
Hsinchu TW |