发明名称 |
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET |
摘要 |
<p>A method of metrology target design is described. The method includes providing a range or a plurality of values for design parameter of a metrology target and by a processor, selecting, by solving for and/or sampling within the range or the plurality of values for the design parameters, a plurality of metrology target designs having one or more design parameters meeting a constraint for a design parameter of the metrology target.</p> |
申请公布号 |
WO2015101459(A1) |
申请公布日期 |
2015.07.09 |
申请号 |
WO2014EP76543 |
申请日期 |
2014.12.04 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
CHEN, GUANGQING;GHAN, JUSTIN;WHYSONG, DAVID, HAROLD |
分类号 |
G03F7/20;G03F9/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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