| 摘要 |
<p>Disclosed are an objective lens support device and a photoetching machine (100). The objective lens support device is installed on the photoetching machine (100). The objective lens support device comprises a main support device (101) and an auxiliary support device (102). One end of the main support device (101) is connected to an objective lens flange (104), and the other end thereof is installed on a main substrate (107). One end of the auxiliary support device (102) is connected to an objective lens body (103), and the other end thereof is installed on an internal frame. By respectively arranging a main support device and an auxiliary support device at an objective lens flange and an objective lens body, entirely rotating the mode vibration shape around the horizontal direction (direction X or direction Y) by taking an installation surface of the objective lens flange as a centre can be eliminated, thereby increasing the mode frequency value of each order of vibration shape, shortening the displacement response differences among the top, the centre and the bottom of the objective lens, and improving the exposure accuracy.</p> |
