摘要 |
PROBLEM TO BE SOLVED: To reduce background noise of a mass spectrometer, by removing neutral particles from an ion beam without reducing measurement sensitivity to ions to be measured as much as possible.SOLUTION: A mass spectrometer includes: plasma generation means for generating plasma for ionizing an introduced sample; interface means for drawing plasma into a vacuum; ion lens means for drawing out ions, as an ion beam, from the plasma and guiding them; collision/reaction cell means for removing interference ions from the ion beam; mass spectrometric analysis means for making predetermined ions from an ion beam from the collision/reaction cell means pass through, on the basis of a mass-to-charge ratio, along a first axis; and detection means for detecting the ions. The mass spectrometer includes ion deflection means prior to the mass spectrometric analysis means, and also includes ion deflection means prior to the ion detection means posterior to the mass spectrometric analysis means. |