发明名称 VIBRATION ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, PHYSICAL QUANTITY SENSOR, MOVABLE BODY AND FREQUENCY ADJUSTMENT METHOD OF VIBRATION ELEMENT
摘要 <p>PROBLEM TO BE SOLVED: To provide a vibration element capable of efficiently and accurately performing a frequency adjustment.SOLUTION: A vibration element includes: a base portion; and a vibration arm 32 extending from the base portion and being provided with a weight portion 5. The weight portion 5 includes: a first weight portion 51 disposed on one principal surface of a leading end portion of the vibration arm 32; and a second weight portion 52 being disposed closer to a base end side than the first weight portion 51 and having a thickness less than that of the first weight portion 51. The vibration arm 32 can be transmitted with an energy line. A laser beam incident region SLL permitting incidence of the energy line into the vibration arm 32 is disposed at a position overlapping with the second weight portion 52 on a principal surface of an opposite side of the vibration arm 32.</p>
申请公布号 JP2015128268(A) 申请公布日期 2015.07.09
申请号 JP20130273626 申请日期 2013.12.27
申请人 SEIKO EPSON CORP 发明人 YAMADA AKINORI;YOSHIDA SHUHEI;ITO TAKASHI;NAKAGAWA HIROSHI
分类号 H03H9/19;H01L41/083;H01L41/113;H01L41/187;H03H3/04;H03H9/215 主分类号 H03H9/19
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