发明名称 |
VIBRATION ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, PHYSICAL QUANTITY SENSOR, MOVABLE BODY AND FREQUENCY ADJUSTMENT METHOD OF VIBRATION ELEMENT |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vibration element capable of efficiently and accurately performing a frequency adjustment.SOLUTION: A vibration element includes: a base portion; and a vibration arm 32 extending from the base portion and being provided with a weight portion 5. The weight portion 5 includes: a first weight portion 51 disposed on one principal surface of a leading end portion of the vibration arm 32; and a second weight portion 52 being disposed closer to a base end side than the first weight portion 51 and having a thickness less than that of the first weight portion 51. The vibration arm 32 can be transmitted with an energy line. A laser beam incident region SLL permitting incidence of the energy line into the vibration arm 32 is disposed at a position overlapping with the second weight portion 52 on a principal surface of an opposite side of the vibration arm 32.</p> |
申请公布号 |
JP2015128268(A) |
申请公布日期 |
2015.07.09 |
申请号 |
JP20130273626 |
申请日期 |
2013.12.27 |
申请人 |
SEIKO EPSON CORP |
发明人 |
YAMADA AKINORI;YOSHIDA SHUHEI;ITO TAKASHI;NAKAGAWA HIROSHI |
分类号 |
H03H9/19;H01L41/083;H01L41/113;H01L41/187;H03H3/04;H03H9/215 |
主分类号 |
H03H9/19 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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