发明名称 MAGNIFYING OBSERVATION DEVICE AND MAGNIFIED IMAGE OBSERVATION METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a magnifying observation device with coaxial episcopic illumination means, which prevents generation of flare while minimizing degradation of image quality.SOLUTION: A magnifying observation device is capable of capturing an image of an object under observation by irradiating the object under observation with illumination light and detecting light intensity of received reflection of the illumination light, and includes; coaxial episcopic illumination means for irradiating the object under observation with coaxial episcopic illumination light CL; a camera unit 10 having an image sensor that receives reflection of the illumination light irradiated by the coaxial episcopic illumination means; an objective lens unit 25 optically coupled with the camera unit 10 with optical axes aligned; a phase delay element 90 located on the optical axis of the objective lens unit 25; display means for displaying an image acquired by the camera unit 10 through the objective lens unit 25; and a polarizing beam splitter 28 which is located on the optical axis of the camera unit 10 and is fixed in a posture to reflect the illumination light from the coaxial episcopic illumination means in a direction that coincides with the optical axis of the camera unit 10.</p>
申请公布号 JP2015127776(A) 申请公布日期 2015.07.09
申请号 JP20130273619 申请日期 2013.12.27
申请人 KEYENCE CORP 发明人 TANAKA MASAKAZU
分类号 G02B21/36 主分类号 G02B21/36
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