METHOD OF MANUFACTURING CERAMIC BODY WITH PILLAR AND HIGH-SENSITIVE SENSOR USING THE SAME

摘要

Disclosed are a method for manufacturing a ceramic structure capable of forming a pillar with a precise channel using a photolithography process and a highly sensitive sensor of a 3D structure using the same. The method for manufacturing the ceramic structure according to the present invention includes the steps of: (a) manufacturing a slurry including a ceramic power, a binder, and a solvent; (b) forming a green ceramic structure by drying the slurry after the slurry is formed with a preset shape; (c) selectively exposing a part to form a channel except a part to form a plurality of pillars or selectively exposing the part to form the pillars and the remaining part in the channel when the green ceramic structure is exposed; (d) forming the channel and the pillar by developing the green ceramic structure which is selectively exposed; and (e) sintering the green ceramic structure on which the channel and the pillar are formed.