发明名称 結晶成長装置
摘要 <p>An apparatus for crystal growth including a source chamber configured to contain a source material, a growth chamber, a passage for transport of vapour from the source chamber to the growth chamber, and a support provided within the growth chamber that is configured to support a seed crystal. The coefficient of thermal expansion of the support is greater than the coefficient of thermal expansion of the growth chamber.</p>
申请公布号 JP5745685(B2) 申请公布日期 2015.07.08
申请号 JP20140501707 申请日期 2012.03.29
申请人 发明人
分类号 C30B23/00;C30B29/48 主分类号 C30B23/00
代理机构 代理人
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